PI Introduces High-Precision V-783 XY Stage for Semiconductor Inspection and Advanced Automation
New monolithic motion platform combines nanometre-level positioning accuracy, 310 mm travel and high-speed scanning to support demanding semiconductor, photonics and metrology applications.
For high-precision applications that do not require the ultimate geometric performance of air bearings, PI's new V-700 series of mechanical-bearing XY stages provides an attractive alternative. The V-783 high-precision linear motion stage combines long travel, nanometer-level positioning performance, and smooth high-speed scanning in a compact monolithic design. Designed and manufactured in the USA, it features a large 360 × 360 mm open aperture and is optimised for semiconductor inspection, photonics alignment, metrology, imaging, laser micro-processing, biotechnology, microscopy, precision assembly, and advanced automation systems.
The V-783 precision positioning system offers 310 × 310 mm travel (12.2 × 12.2 in) in a rigid monolithic XY configuration that delivers greater stiffness and a lower profile than conventional stacked-stage designs based on two individual axes. The large open aperture supports transmissive-light applications, while direct-drive brushless ironless linear motors eliminate backlash and mechanical drivetrain effects for smooth, highly repeatable motion.
Key Specifications
- ±0.07 µm bidirectional repeatability and ±0.17 µm positioning accuracy
- 1 nm encoder resolution with incremental or absolute encoder options
- Velocity to 1 m/s and acceleration to 10 m/s²
- Straightness and flatness to 0.75 µm
- 310 × 310 mm (12.2 × 12.2 in) travel, ideal for 300 mm wafer applications
- 360 × 360 mm open aperture for transmitted-light and inspection systems
- Monolithic XY design with load capacity up to 50 kg
An optional absolute encoder provides immediate position feedback after power-up, eliminating homing routines and reducing machine downtime.
Advanced Motion Controllers and Software
When combined with PI's A-800 ACS-based motion controllers, the V-783 XY stage becomes part of a high-performance motion platform supporting synchronised multi-axis operation, EtherCAT networking, advanced servo algorithms, and automation-ready system integration. The motion controller is supported by a comprehensive software suite for users and programmers.
By combining direct-drive performance, nanometer-resolution feedback, high geometric accuracy, long travel, and a large aperture in a compact package, the V-783 XY system provides OEMs and system builders with a robust positioning solution for precision inspection, manufacturing, and automation applications.
Industries Served and Applications
Semiconductor manufacturing, photonics alignment, optical and wafer inspection, flat panel display inspection, metrology, microscopy, laser processing, precision assembly, and industrial automation.
